Characteristics of ZrO~2/Al~2O~3 Bilayer Film for Gate Dielectric Applications Deposited by Atomic Layer Deposition Method: Fid-Bau Portal

Characteristics of ZrO~2/Al~2O~3 Bilayer Film for Gate Dielectric Applications Deposited by Atomic Layer Deposition Method

Kim, Y. D. / Lee, J. H. / Koo, J. H. / Chang, H. J. / Jeon, H. T.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Characteristics of ZrO~2/Al~2O~3 Bilayer Film for Gate Dielectric Applications Deposited by Atomic Layer Deposition Method

Kim, Y. D. / Lee, J. H. / Koo, J. H. / Chang, H. J. / Jeon, H. T.

Characteristics of ZrO~2/Al~2O~3 Bilayer Film for Gate Dielectric Applications Deposited by Atomic Layer Deposition Method

Kim, Y. D. / Lee, J. H. / Koo, J. H. / Chang, H. J. / Jeon, H. T.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Characteristics of ZrO~2/Al~2O~3 Bilayer Film for Gate Dielectric Applications Deposited by Atomic Layer Deposition Method

Contributors:

Kim, Y. D. (author) / Lee, J. H. (author) / Koo, J. H. (author) / Chang, H. J. (author) / Jeon, H. T. (author) / Kang, S.-G. / Kobayashi, T.

Published in:

Designing, Processing and Properties of Advanced Engineering Materials PART 1 ; 497-500

MATERIALS SCIENCE FORUM ; 449/452

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Dam, V.A.T. / Blauw, M.A. / Brongersma, S.H. et al. | British Library Online Contents | 2014

GaN metal-oxide-semiconductor field-effect-transistor with atomic layer deposited Al2O3 as gate dielectric

Wu, Y. Q. / Ye, P. D. / Wilk, G. D. et al. | British Library Online Contents | 2006

Interfacial and electrical properties of Al2O3/HfO2 bilayer deposited by atomic layer deposition on GeON passivated germanium surface

Patil, V.S. / Agrawal, K.S. / Khairnar, A.G. et al. | British Library Online Contents | 2017

Interfacial and electrical properties of Al2O3/HfO2 bilayer deposited by atomic layer deposition on GeON passivated germanium surface

Patil, V.S. / Agrawal, K.S. / Khairnar, A.G. et al. | British Library Online Contents | 2017

Low interface trap density in scaled bilayer gate oxides on 2D materials via nanofog low temperature atomic layer deposition

Kwak, Iljo / Kavrik, Mahmut / Park, Jun Hong et al. | British Library Online Contents | 2019