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Study of polymer humidity sensor array on silicon wafer

Wang, J. / Shi, K. / Chen, L. / Zhang, X.

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Study of polymer humidity sensor array on silicon wafer

Wang, J. / Shi, K. / Chen, L. / Zhang, X.

Study of polymer humidity sensor array on silicon wafer

Wang, J. / Shi, K. / Chen, L. / Zhang, X.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Study of polymer humidity sensor array on silicon wafer

Contributors:

Wang, J. (author) / Shi, K. (author) / Chen, L. (author) / Zhang, X. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE ; 39 ; 3155-3157

Publication date:

2004-01-01

Size:

3 pages

ISSN:

0022-2461

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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