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    The Mechanism of Polymer Particles in Silicon Wafer CMP

    New search for: Xu, X.F.
    New search for: Chen, H.F.
    New search for: Ma, H.T.
    New search for: Ma, B.X.
    New search for: Peng, W.
    New search for: Guo, D.
    New search for: Wang, J.
    New search for: Jia, Z.
    New search for: Kang, R.
    New search for: Gao, H.
    New search for: Wang, X.

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    The Mechanism of Polymer Particles in Silicon Wafer CMP

    New search for: Xu, X.F.
    New search for: Chen, H.F.
    New search for: Ma, H.T.
    New search for: Ma, B.X.
    New search for: Peng, W.
    New search for: Guo, D.
    New search for: Wang, J.
    New search for: Jia, Z.
    New search for: Kang, R.
    New search for: Gao, H.
    New search for: Wang, X.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    The Mechanism of Polymer Particles in Silicon Wafer CMP

    New search for: Xu, X.F.
    New search for: Chen, H.F.
    New search for: Ma, H.T.
    New search for: Ma, B.X.
    New search for: Peng, W.
    New search for: Guo, D.
    New search for: Wang, J.
    New search for: Jia, Z.
    New search for: Kang, R.
    New search for: Gao, H.
    New search for: Wang, X.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
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    Document information
    Title:

    The Mechanism of Polymer Particles in Silicon Wafer CMP

    Contributors:

    Xu, X.F. (author) / Chen, H.F. (author) / Ma, H.T. (author) / Ma, B.X. (author) / Peng, W. (author) / Guo, D. / Wang, J. / Jia, Z. / Kang, R. / Gao, H.

    Published in:

    Advances in Materials Manufacturing Science and Technology XIII Volume I Advanced Manufacturing Technology and Equipment, and Manufacturing Systems and Automation ; 231-236

    MATERIALS SCIENCE FORUM ; 626/627

    Publication date:

    2009-01-01

    Size:

    6 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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