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Reactive ion etching of organic polymers for application in waveguide trench molds
Reactive ion etching of organic polymers for application in waveguide trench molds
Reactive ion etching of organic polymers for application in waveguide trench molds
Holland, A. S. (author) / Leech, P. W. (author) / Reeves, G. K. (author)
JOURNAL OF MATERIALS SCIENCE ; 39 ; 3505-3508
2004-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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