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    Bulk Micromachining of Polycrystalline SiC Using Si Molds Fabricated by Deep Reactive Ion Etching

    New search for: Rajan, N.
    New search for: Zorman, C. A.
    New search for: Mehregany, M.

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    Bulk Micromachining of Polycrystalline SiC Using Si Molds Fabricated by Deep Reactive Ion Etching

    New search for: Rajan, N.
    New search for: Zorman, C. A.
    New search for: Mehregany, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Bulk Micromachining of Polycrystalline SiC Using Si Molds Fabricated by Deep Reactive Ion Etching

    New search for: Rajan, N.
    New search for: Zorman, C. A.
    New search for: Mehregany, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
    Title:

    Bulk Micromachining of Polycrystalline SiC Using Si Molds Fabricated by Deep Reactive Ion Etching

    Contributors:

    Rajan, N. (author) / Zorman, C. A. (author) / Mehregany, M. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 338/342 ; 1145-1148

    Publication date:

    2000-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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