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    VUV spectroscopic ellipsometry applied to the characterization of high-k dielectrics

    New search for: Boher, P.
    New search for: Defranoux, C.
    New search for: Heinrich, P.
    New search for: Wolstenholme, J.
    New search for: Bender, H.

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    VUV spectroscopic ellipsometry applied to the characterization of high-k dielectrics

    New search for: Boher, P.
    New search for: Defranoux, C.
    New search for: Heinrich, P.
    New search for: Wolstenholme, J.
    New search for: Bender, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    VUV spectroscopic ellipsometry applied to the characterization of high-k dielectrics

    New search for: Boher, P.
    New search for: Defranoux, C.
    New search for: Heinrich, P.
    New search for: Wolstenholme, J.
    New search for: Bender, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    VUV spectroscopic ellipsometry applied to the characterization of high-k dielectrics

    Contributors:

    Boher, P. (author) / Defranoux, C. (author) / Heinrich, P. (author) / Wolstenholme, J. (author) / Bender, H. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 109 ; 64-68

    Publication date:

    2004-01-01

    Size:

    5 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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