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A study of silicon oxynitride film prepared by ion beam assisted deposition

Wang, Y. / Cheng, X. / Lin, Z. / Zhang, C. / Xiao, H. / Zhang, F. / Zou, S.

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A study of silicon oxynitride film prepared by ion beam assisted deposition

Wang, Y. / Cheng, X. / Lin, Z. / Zhang, C. / Xiao, H. / Zhang, F. / Zou, S.

A study of silicon oxynitride film prepared by ion beam assisted deposition

Wang, Y. / Cheng, X. / Lin, Z. / Zhang, C. / Xiao, H. / Zhang, F. / Zou, S.

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Document information

Title:

A study of silicon oxynitride film prepared by ion beam assisted deposition

Contributors:

Wang, Y. (author) / Cheng, X. (author) / Lin, Z. (author) / Zhang, C. (author) / Xiao, H. (author) / Zhang, F. (author) / Zou, S. (author)

Published in:

MATERIALS LETTERS ; 58 ; 2261-2265

Publication date:

2004-01-01

Size:

5 pages

ISSN:

0167-577X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105 / 530

Wang, Y. / Zhang, J. / Zhang, F. et al. | British Library Online Contents | 2005

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