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    Synthesis and characterization of multi-element oxynitride semiconductor film prepared by reactive sputtering deposition

    New search for: Yu, R. S.
    New search for: Huang, R. H.
    New search for: Lee, C. M.
    New search for: Shieu, F. S.

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    Synthesis and characterization of multi-element oxynitride semiconductor film prepared by reactive sputtering deposition

    New search for: Yu, R. S.
    New search for: Huang, R. H.
    New search for: Lee, C. M.
    New search for: Shieu, F. S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Synthesis and characterization of multi-element oxynitride semiconductor film prepared by reactive sputtering deposition

    New search for: Yu, R. S.
    New search for: Huang, R. H.
    New search for: Lee, C. M.
    New search for: Shieu, F. S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Synthesis and characterization of multi-element oxynitride semiconductor film prepared by reactive sputtering deposition

    Contributors:

    Yu, R. S. (author) / Huang, R. H. (author) / Lee, C. M. (author) / Shieu, F. S. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 263 ; 58-61

    Publication date:

    2012-01-01

    Size:

    4 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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