Modification of refractive index in silicon oxynitride films during deposition: Fid-Bau Portal

Modification of refractive index in silicon oxynitride films during deposition

Machorro, R. / Samano, E. C. / Soto, G. / Villa, F. / Cota-Araiza, L.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Modification of refractive index in silicon oxynitride films during deposition

Machorro, R. / Samano, E. C. / Soto, G. / Villa, F. / Cota-Araiza, L.

Modification of refractive index in silicon oxynitride films during deposition

Machorro, R. / Samano, E. C. / Soto, G. / Villa, F. / Cota-Araiza, L.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Modification of refractive index in silicon oxynitride films during deposition

Contributors:

Machorro, R. (author) / Samano, E. C. (author) / Soto, G. (author) / Villa, F. (author) / Cota-Araiza, L. (author)

Published in:

MATERIALS LETTERS ; 45 ; 47-50

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0167-577X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105 / 530

Bose, M. / Bose, D. N. / Basa, D. K. | British Library Online Contents | 2002

Effect of film chemistry on refractive index of plasma-enhanced chemical vapor deposited silicon oxynitride films: A correlative study

Naskar, S. / Wolter, S.D. / Bower, C.A. et al. | British Library Online Contents | 2008

XRR and GISAXS study of silicon oxynitride films

Bernstorff, S. / Dubcek, P. / Pivac, B. et al. | British Library Online Contents | 2006

Deuterium diffusion into plasma-deposited silicon oxynitride films

Arnoldbik, W. M. / Maree, C. H. M. / Habraken, F. H. P. M. | British Library Online Contents | 1994

Characterization of silicon oxynitride thin films deposited by electron beam physical vapor deposition technique

Mohite, K. C. / Khollam, Y. B. / Mandale, A. B. et al. | British Library Online Contents | 2003