Effect of annealing ambient on the thermal stability of Cu/Zr42Si9N49/Si contact system: Fid-Bau Portal

Effect of annealing ambient on the thermal stability of Cu/Zr42Si9N49/Si contact system

Wang, Y. / Zhu, C. / Song, Z. / Wu, C.

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Effect of annealing ambient on the thermal stability of Cu/Zr42Si9N49/Si contact system

Wang, Y. / Zhu, C. / Song, Z. / Wu, C.

Effect of annealing ambient on the thermal stability of Cu/Zr42Si9N49/Si contact system

Wang, Y. / Zhu, C. / Song, Z. / Wu, C.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Effect of annealing ambient on the thermal stability of Cu/Zr42Si9N49/Si contact system

Contributors:

Wang, Y. (author) / Zhu, C. (author) / Song, Z. (author) / Wu, C. (author)

Published in:

MATERIALS LETTERS ; 58 ; 2510-2513

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0167-577X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105 / 530

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