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    Effect of rapid thermal annealing of sputtered aluminium nitride film in an oxygen ambient

    New search for: Jang, K.
    New search for: Lee, K.
    New search for: Kim, J.
    New search for: Hwang, S.
    New search for: Lee, J.
    New search for: Kumar Dhungel, S.
    New search for: Jung, S.
    New search for: Yi, J.

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    Effect of rapid thermal annealing of sputtered aluminium nitride film in an oxygen ambient

    New search for: Jang, K.
    New search for: Lee, K.
    New search for: Kim, J.
    New search for: Hwang, S.
    New search for: Lee, J.
    New search for: Kumar Dhungel, S.
    New search for: Jung, S.
    New search for: Yi, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effect of rapid thermal annealing of sputtered aluminium nitride film in an oxygen ambient

    New search for: Jang, K.
    New search for: Lee, K.
    New search for: Kim, J.
    New search for: Hwang, S.
    New search for: Lee, J.
    New search for: Kumar Dhungel, S.
    New search for: Jung, S.
    New search for: Yi, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Effect of rapid thermal annealing of sputtered aluminium nitride film in an oxygen ambient

    Contributors:

    Jang, K. (author) / Lee, K. (author) / Kim, J. (author) / Hwang, S. (author) / Lee, J. (author) / Kumar Dhungel, S. (author) / Jung, S. (author) / Yi, J. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 1137-1141

    Publication date:

    2006-01-01

    Size:

    5 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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