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Investigations of semiconductor devices using SIMS; diffusion, contamination, process control

Lee, J. C. / Won, J. / Chung, Y. / Lee, H. / Lee, E. / Kang, D. / Kim, C. / Choi, J. / Kim, J.

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Investigations of semiconductor devices using SIMS; diffusion, contamination, process control

Lee, J. C. / Won, J. / Chung, Y. / Lee, H. / Lee, E. / Kang, D. / Kim, C. / Choi, J. / Kim, J.

Investigations of semiconductor devices using SIMS; diffusion, contamination, process control

Lee, J. C. / Won, J. / Chung, Y. / Lee, H. / Lee, E. / Kang, D. / Kim, C. / Choi, J. / Kim, J.

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Document information

Title:

Investigations of semiconductor devices using SIMS; diffusion, contamination, process control

Contributors:

Lee, J. C. (author) / Won, J. (author) / Chung, Y. (author) / Lee, H. (author) / Lee, E. (author) / Kang, D. (author) / Kim, C. (author) / Choi, J. (author) / Kim, J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 1395-1399

Publication date:

2008-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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