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Electrical and Structural Properties of Al-Implanted and Annealed 4H-SiC
Electrical and Structural Properties of Al-Implanted and Annealed 4H-SiC
Electrical and Structural Properties of Al-Implanted and Annealed 4H-SiC
Obernhofer, M. (author) / Krieger, M. (author) / Schmid, F. (author) / Weber, H. B. (author) / Pensl, G. (author) / Schoner, A. (author) / Wright, N. / Johnson, C. M. / Vassilevski, K. / Nikitina, I.
2007-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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