Hydrogen Implantation in III-V Compound Semiconductors and its Redistribution with Annealing

Zavada, J. M. / Wilson, R. G. | British Library Online Contents | 1994

Hydrogen redistribution and enhanced thermal donor formation at post implantation annealing of p-type hydrogen implanted Czochralski silicon

Ulyashin, A. G. / Ivanov, A. I. / Khorunzhii, I. A. et al. | British Library Online Contents | 1999

Hydrogen redistribution in CVD SiO~2 during post-oxidation annealing investigated by SIMS

Kawashima, Y. / Kawano, H. / Terashima, K. et al. | British Library Online Contents | 2004

A new encapsulation method of InP during post implantation annealing

Kadoun, A. / Tardy, J. / Thomas, I. et al. | British Library Online Contents | 1993

Effect of annealing environment on antimony redistribution in pseudomorphic Si/SiGe/SiSb heterostructures

Avrutin, V. S. / Barabanenkov, M. Y. / Izyumskaya, N. F. et al. | British Library Online Contents | 2002