Hydrogen redistribution and enhanced thermal donor formation at post implantation annealing of p-type hydrogen implanted Czochralski silicon: Fid-Bau Portal

Hydrogen redistribution and enhanced thermal donor formation at post implantation annealing of p-type hydrogen implanted Czochralski silicon

Ulyashin, A. G. / Ivanov, A. I. / Khorunzhii, I. A. / Job, R. / Fahrner, W. R. / Komarov, F. F. / Kamyshan, A. C.

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Hydrogen redistribution and enhanced thermal donor formation at post implantation annealing of p-type hydrogen implanted Czochralski silicon

Ulyashin, A. G. / Ivanov, A. I. / Khorunzhii, I. A. / Job, R. / Fahrner, W. R. / Komarov, F. F. / Kamyshan, A. C.

Hydrogen redistribution and enhanced thermal donor formation at post implantation annealing of p-type hydrogen implanted Czochralski silicon

Ulyashin, A. G. / Ivanov, A. I. / Khorunzhii, I. A. / Job, R. / Fahrner, W. R. / Komarov, F. F. / Kamyshan, A. C.

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Title:

Hydrogen redistribution and enhanced thermal donor formation at post implantation annealing of p-type hydrogen implanted Czochralski silicon

Contributors:

Ulyashin, A. G. (author) / Ivanov, A. I. (author) / Khorunzhii, I. A. (author) / Job, R. (author) / Fahrner, W. R. (author) / Komarov, F. F. (author) / Kamyshan, A. C. (author) / Weber, J. / Mesli, A.

Published in:

Symposium A Detects in Snmon Hy[?] ; 91-94

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 58

Publication date:

1999-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Ulyashin, A. G. / Ivanov, A. I. / Job, R. et al. | British Library Online Contents | 2000

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