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Self-Aligned Short-Channel Vertical Power DMOSFETs in 4H-SiC
Self-Aligned Short-Channel Vertical Power DMOSFETs in 4H-SiC
Self-Aligned Short-Channel Vertical Power DMOSFETs in 4H-SiC
Matin, M. (author) / Saha, A. (author) / Cooper, J. A. (author)
MATERIALS SCIENCE FORUM ; 457/460 ; 1393-1396
2004-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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