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Homoepitaxial On-Axis Growth of 4H- and 6H-SiC by CVD

Hallin, C. / Wahab, Q. / Ivanov, I. / Bergman, P. / Janzen, E.

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Homoepitaxial On-Axis Growth of 4H- and 6H-SiC by CVD

Hallin, C. / Wahab, Q. / Ivanov, I. / Bergman, P. / Janzen, E.

Homoepitaxial On-Axis Growth of 4H- and 6H-SiC by CVD

Hallin, C. / Wahab, Q. / Ivanov, I. / Bergman, P. / Janzen, E.

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Document information

Title:

Homoepitaxial On-Axis Growth of 4H- and 6H-SiC by CVD

Contributors:

Hallin, C. (author) / Wahab, Q. (author) / Ivanov, I. (author) / Bergman, P. (author) / Janzen, E. (author)

Published in:

MATERIALS SCIENCE FORUM ; 457/460 ; 193-196

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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