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Homoepitaxial On-Axis Growth of 4H- and 6H-SiC by CVD
Homoepitaxial On-Axis Growth of 4H- and 6H-SiC by CVD
Homoepitaxial On-Axis Growth of 4H- and 6H-SiC by CVD
Hallin, C. (Autor:in) / Wahab, Q. (Autor:in) / Ivanov, I. (Autor:in) / Bergman, P. (Autor:in) / Janzen, E. (Autor:in)
MATERIALS SCIENCE FORUM ; 457/460 ; 193-196
01.01.2004
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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