Growth of Homoepitaxial Films on 4H-SiC(1120)and 8^o Off-Axis 4H-SiC(0001) Substrates and their Characterization: Fid-Bau Portal

Growth of Homoepitaxial Films on 4H-SiC(1120)and 8^o Off-Axis 4H-SiC(0001) Substrates and their Characterization

Bishop, S. M. / Preble, E. A. / Hallin, C. / Henry, A. / Storasta, L. / Jacobson, H. / Wagner, B. P. / Reitmeier, Z. J. / Janzen, E. / Davis, R. F.

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Growth of Homoepitaxial Films on 4H-SiC(1120)and 8^o Off-Axis 4H-SiC(0001) Substrates and their Characterization

Bishop, S. M. / Preble, E. A. / Hallin, C. / Henry, A. / Storasta, L. / Jacobson, H. / Wagner, B. P. / Reitmeier, Z. J. / Janzen, E. / Davis, R. F.

Growth of Homoepitaxial Films on 4H-SiC(1120)and 8^o Off-Axis 4H-SiC(0001) Substrates and their Characterization

Bishop, S. M. / Preble, E. A. / Hallin, C. / Henry, A. / Storasta, L. / Jacobson, H. / Wagner, B. P. / Reitmeier, Z. J. / Janzen, E. / Davis, R. F.

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Title:

Growth of Homoepitaxial Films on 4H-SiC(1120)and 8^o Off-Axis 4H-SiC(0001) Substrates and their Characterization

Contributors:

Bishop, S. M. (author) / Preble, E. A. (author) / Hallin, C. (author) / Henry, A. (author) / Storasta, L. (author) / Jacobson, H. (author) / Wagner, B. P. (author) / Reitmeier, Z. J. (author) / Janzen, E. (author) / Davis, R. F. (author)

Published in:

MATERIALS SCIENCE FORUM ; 457/460 ; 221-224

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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