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Using Vapour-Liquid-Solid Mechanism for SiC Homoepitaxial Growth on on-axis alpha-SiC (0001) at Low Temperature
Using Vapour-Liquid-Solid Mechanism for SiC Homoepitaxial Growth on on-axis alpha-SiC (0001) at Low Temperature
Using Vapour-Liquid-Solid Mechanism for SiC Homoepitaxial Growth on on-axis alpha-SiC (0001) at Low Temperature
Soueidan, M. (author) / Ferro, G. (author) / Cauwet, F. (author) / Mollet, L. (author) / Jacquier, C. (author) / Younes, G. (author) / Monteil, Y. (author) / Devaty, R. P. / Larkin, D. J. / Saddow, S. E.
2006-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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