Defects in He^+ Irradiated 6H-SiC Probed by DLTS and LTPL Measurements: Fid-Bau Portal

Defects in He^+ Irradiated 6H-SiC Probed by DLTS and LTPL Measurements

Ruggiero, A. / Libertino, S. / Mauceri, M. / Reitano, R. / Musumeci, P. / Roccaforte, F. / La Via, F. / Calcagno, L.

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Defects in He^+ Irradiated 6H-SiC Probed by DLTS and LTPL Measurements

Ruggiero, A. / Libertino, S. / Mauceri, M. / Reitano, R. / Musumeci, P. / Roccaforte, F. / La Via, F. / Calcagno, L.

Defects in He^+ Irradiated 6H-SiC Probed by DLTS and LTPL Measurements

Ruggiero, A. / Libertino, S. / Mauceri, M. / Reitano, R. / Musumeci, P. / Roccaforte, F. / La Via, F. / Calcagno, L.

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Title:

Defects in He^+ Irradiated 6H-SiC Probed by DLTS and LTPL Measurements

Contributors:

Ruggiero, A. (author) / Libertino, S. (author) / Mauceri, M. (author) / Reitano, R. (author) / Musumeci, P. (author) / Roccaforte, F. (author) / La Via, F. (author) / Calcagno, L. (author)

Published in:

MATERIALS SCIENCE FORUM ; 457/460 ; 493-496

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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