Crystal Quality Evaluation of 6H-SiC Layers Grown by Liquid Phase Epitaxy around Micropipes using Micro-Raman Scattering Spectroscopy: Fid-Bau Portal

Crystal Quality Evaluation of 6H-SiC Layers Grown by Liquid Phase Epitaxy around Micropipes using Micro-Raman Scattering Spectroscopy

Ujihara, T. / Munetoh, S. / Kusunoki, K. / Kamei, K. / Usami, N. / Fujiwara, K. / Sazaki, G. / Nakajima, K.

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Crystal Quality Evaluation of 6H-SiC Layers Grown by Liquid Phase Epitaxy around Micropipes using Micro-Raman Scattering Spectroscopy

Ujihara, T. / Munetoh, S. / Kusunoki, K. / Kamei, K. / Usami, N. / Fujiwara, K. / Sazaki, G. / Nakajima, K.

Crystal Quality Evaluation of 6H-SiC Layers Grown by Liquid Phase Epitaxy around Micropipes using Micro-Raman Scattering Spectroscopy

Ujihara, T. / Munetoh, S. / Kusunoki, K. / Kamei, K. / Usami, N. / Fujiwara, K. / Sazaki, G. / Nakajima, K.

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Document information

Title:

Crystal Quality Evaluation of 6H-SiC Layers Grown by Liquid Phase Epitaxy around Micropipes using Micro-Raman Scattering Spectroscopy

Contributors:

Ujihara, T. (author) / Munetoh, S. (author) / Kusunoki, K. (author) / Kamei, K. (author) / Usami, N. (author) / Fujiwara, K. (author) / Sazaki, G. (author) / Nakajima, K. (author)

Published in:

MATERIALS SCIENCE FORUM ; 457/460 ; 633-636

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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