Nitrogen Doping of Epitaxial SiC: Experimental Evidence of the Re-Incorporation of Etched Nitrogen during Growth: Fid-Bau Portal

Nitrogen Doping of Epitaxial SiC: Experimental Evidence of the Re-Incorporation of Etched Nitrogen during Growth

Meziere, J. / Ferret, P. / Blanquet, E. / Pons, M. / Di Cioccio, L. / Billon, T.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Nitrogen Doping of Epitaxial SiC: Experimental Evidence of the Re-Incorporation of Etched Nitrogen during Growth

Meziere, J. / Ferret, P. / Blanquet, E. / Pons, M. / Di Cioccio, L. / Billon, T.

Nitrogen Doping of Epitaxial SiC: Experimental Evidence of the Re-Incorporation of Etched Nitrogen during Growth

Meziere, J. / Ferret, P. / Blanquet, E. / Pons, M. / Di Cioccio, L. / Billon, T.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Nitrogen Doping of Epitaxial SiC: Experimental Evidence of the Re-Incorporation of Etched Nitrogen during Growth

Contributors:

Meziere, J. (author) / Ferret, P. (author) / Blanquet, E. (author) / Pons, M. (author) / Di Cioccio, L. (author) / Billon, T. (author)

Published in:

MATERIALS SCIENCE FORUM ; 457/460 ; 731-734

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Danielsson, O. / Forsberg, U. / Janzen, E. | British Library Online Contents | 2003

In Situ Nitrogen and Aluminum Doping in Migration Enhanced Embedded Epitaxial Growth of 4H-SiC

Schoner, A. / Sugiyama, N. / Takeuchi, Y. et al. | British Library Online Contents | 2009

Nitrogen doping in ZnSe

Poeykkoe, S. / Puska, M. J. / Korhonen, T. et al. | British Library Online Contents | 1997

Incorporation of nitrogen in diamond by using a modulated growth technique

Kweon, M.-C. / Lee, S.-H. / Kim, E.-M. et al. | British Library Online Contents | 2001

Incorporation of Hydrogen (^1H and ^2H) into 4H-SiC during Epitaxial Growth

Linnarsson, M. K. / Forsberg, U. / Janson, M. S. et al. | British Library Online Contents | 2002