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Formation of SiC Delta-Doped-Layer Structures by CVD

Takahashi, K. / Uchida, M. / Kusumoto, O. / Yamashita, K. / Miyanaga, R. / Kitabatake, M.

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Formation of SiC Delta-Doped-Layer Structures by CVD

Takahashi, K. / Uchida, M. / Kusumoto, O. / Yamashita, K. / Miyanaga, R. / Kitabatake, M.

Formation of SiC Delta-Doped-Layer Structures by CVD

Takahashi, K. / Uchida, M. / Kusumoto, O. / Yamashita, K. / Miyanaga, R. / Kitabatake, M.

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Title:

Formation of SiC Delta-Doped-Layer Structures by CVD

Contributors:

Takahashi, K. (author) / Uchida, M. (author) / Kusumoto, O. (author) / Yamashita, K. (author) / Miyanaga, R. (author) / Kitabatake, M. (author)

Published in:

MATERIALS SCIENCE FORUM ; 457/460 ; 743-746

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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