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Challenges for the characterization and integration of high-kappa dielectrics

Wallace, R. M.

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Challenges for the characterization and integration of high-kappa dielectrics

Wallace, R. M.

Challenges for the characterization and integration of high-kappa dielectrics

Wallace, R. M.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Challenges for the characterization and integration of high-kappa dielectrics

Contributors:

Wallace, R. M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 231/232 ; 543-551

Publication date:

2004-01-01

Size:

9 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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