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    On the reliability of SIMS depth profiles through HfO~2-stacks

    New search for: Vandervorst, W.
    New search for: Bennett, J.
    New search for: Huyghebaert, C.
    New search for: Conard, T.
    New search for: Gondran, C.
    New search for: De Witte, H.

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    On the reliability of SIMS depth profiles through HfO~2-stacks

    New search for: Vandervorst, W.
    New search for: Bennett, J.
    New search for: Huyghebaert, C.
    New search for: Conard, T.
    New search for: Gondran, C.
    New search for: De Witte, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    On the reliability of SIMS depth profiles through HfO~2-stacks

    New search for: Vandervorst, W.
    New search for: Bennett, J.
    New search for: Huyghebaert, C.
    New search for: Conard, T.
    New search for: Gondran, C.
    New search for: De Witte, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    On the reliability of SIMS depth profiles through HfO~2-stacks

    Contributors:

    Vandervorst, W. (author) / Bennett, J. (author) / Huyghebaert, C. (author) / Conard, T. (author) / Gondran, C. (author) / De Witte, H. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 231/232 ; 569-573

    Publication date:

    2004-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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