Oxygen flooding and sample cooling during depth profiling of HfSiON thin films

Miwa, S. | British Library Online Contents | 2008

Roughness development in the depth profiling with 500eV O2+ beam with the combination of oxygen flooding and sample rotation

Gui, D. / Xing, Z. X. / Huang, Y. H. et al. | British Library Online Contents | 2008

Sputter depth profiling by secondary ion mass spectrometry coupled with sample current measurements

Bardi, U. / Chenakin, S. P. / Lavacchi, A. et al. | British Library Online Contents | 2006

Depth profiling using ultra-low-energy secondary ion mass spectrometry

Dowsett, M. G. | British Library Online Contents | 2003

High depth resolution depth profiling of metal films using SIMS and sample rotation

Sykes, D. E. / Chew, A. / Hems, J. et al. | British Library Online Contents | 1996