SIMS depth profiling of SiGe:C structures in test pattern areas using low energy cesium with a Cameca IMS Wf: Fid-Bau Portal

SIMS depth profiling of SiGe:C structures in test pattern areas using low energy cesium with a Cameca IMS Wf

Juhel, M. / Laugier, F.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

SIMS depth profiling of SiGe:C structures in test pattern areas using low energy cesium with a Cameca IMS Wf

Juhel, M. / Laugier, F.

SIMS depth profiling of SiGe:C structures in test pattern areas using low energy cesium with a Cameca IMS Wf

Juhel, M. / Laugier, F.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

SIMS depth profiling of SiGe:C structures in test pattern areas using low energy cesium with a Cameca IMS Wf

Contributors:

Juhel, M. (author) / Laugier, F. (author)

Published in:

APPLIED SURFACE SCIENCE ; 231/232 ; 698-703

Publication date:

2004-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Merkulov, A. / Merkulova, O. / de Chambost, E. et al. | British Library Online Contents | 2004

Cesium redeposition artifacts during low energy ToF-SIMS depth profiling

Vitchev, R. G. / Brison, J. / Houssiau, L. | British Library Online Contents | 2009

CAMECA IMS 7f-GEO: Specialized SIMS tool for geosciences

Peres, P. / de Chambost, E. / Schuhmacher, M. | British Library Online Contents | 2008

SIMS analysis of residual gas elements with a Cameca IMS-6f ion microprobe

Kudriavtsev, Y. / Villegas, A. / Godines, A. et al. | British Library Online Contents | 2006

Short-term and long-term RSF repeatability for CAMECA SC-Ultra SIMS measurements

Barozzi, M. / Giubertoni, D. / Anderle, M. et al. | British Library Online Contents | 2004