Accurate on-line depth calibration with a laser interferometer during SIMS profiling on the Cameca IMS WF instrument: Fid-Bau Portal

Accurate on-line depth calibration with a laser interferometer during SIMS profiling on the Cameca IMS WF instrument

Merkulov, A. / Merkulova, O. / de Chambost, E. / Schuhmacher, M.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Accurate on-line depth calibration with a laser interferometer during SIMS profiling on the Cameca IMS WF instrument

Merkulov, A. / Merkulova, O. / de Chambost, E. / Schuhmacher, M.

Accurate on-line depth calibration with a laser interferometer during SIMS profiling on the Cameca IMS WF instrument

Merkulov, A. / Merkulova, O. / de Chambost, E. / Schuhmacher, M.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Accurate on-line depth calibration with a laser interferometer during SIMS profiling on the Cameca IMS WF instrument

Contributors:

Merkulov, A. (author) / Merkulova, O. (author) / de Chambost, E. (author) / Schuhmacher, M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 231/232 ; 954-958

Publication date:

2004-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Juhel, M. / Laugier, F. | British Library Online Contents | 2004

CAMECA IMS 7f-GEO: Specialized SIMS tool for geosciences

Peres, P. / de Chambost, E. / Schuhmacher, M. | British Library Online Contents | 2008

Accurate SIMS depth profiling for ultra-shallow implants using backside SIMS

Hongo, C. / Tomita, M. / Takenaka, M. et al. | British Library Online Contents | 2003

SIMS analysis of residual gas elements with a Cameca IMS-6f ion microprobe

Kudriavtsev, Y. / Villegas, A. / Godines, A. et al. | British Library Online Contents | 2006

Accurate depth profiling for ultra-shallow implants using backside-SIMS

Hongo, C. / Tomita, M. / Takenaka, M. | British Library Online Contents | 2004