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Fabrication of PECVD-silicon oxynitride-based optical waveguides

Alayo, M. I. / Criado, D. / Carreno, M. N. / Pereyra, I.

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Fabrication of PECVD-silicon oxynitride-based optical waveguides

Alayo, M. I. / Criado, D. / Carreno, M. N. / Pereyra, I.

Fabrication of PECVD-silicon oxynitride-based optical waveguides

Alayo, M. I. / Criado, D. / Carreno, M. N. / Pereyra, I.

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Document information

Title:

Fabrication of PECVD-silicon oxynitride-based optical waveguides

Contributors:

Alayo, M. I. (author) / Criado, D. (author) / Carreno, M. N. (author) / Pereyra, I. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 112 ; 154-159

Publication date:

2004-01-01

Size:

6 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Pernas, P. L. / Ruiz, E. / Garrido, J. et al. | British Library Online Contents | 2005

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