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Fabrication of PECVD-silicon oxynitride-based optical waveguides
Fabrication of PECVD-silicon oxynitride-based optical waveguides
Fabrication of PECVD-silicon oxynitride-based optical waveguides
Alayo, M. I. (author) / Criado, D. (author) / Carreno, M. N. (author) / Pereyra, I. (author)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 112 ; 154-159
2004-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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