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Silicon Oxynitride ECR-PECVD Films for Integrated Optics

Pernas, P. L. / Ruiz, E. / Garrido, J. / Piqueras, J. / Paszti, F. / Climent-Font, A. / Lifante, G. / Cantelar, E.

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Silicon Oxynitride ECR-PECVD Films for Integrated Optics

Pernas, P. L. / Ruiz, E. / Garrido, J. / Piqueras, J. / Paszti, F. / Climent-Font, A. / Lifante, G. / Cantelar, E.

Silicon Oxynitride ECR-PECVD Films for Integrated Optics

Pernas, P. L. / Ruiz, E. / Garrido, J. / Piqueras, J. / Paszti, F. / Climent-Font, A. / Lifante, G. / Cantelar, E.

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Check availability in my library

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Document information

Title:

Silicon Oxynitride ECR-PECVD Films for Integrated Optics

Contributors:

Pernas, P. L. (author) / Ruiz, E. (author) / Garrido, J. (author) / Piqueras, J. (author) / Paszti, F. (author) / Climent-Font, A. (author) / Lifante, G. (author) / Cantelar, E. (author) / Mendez-Vilas, A.

Published in:

Cross-Disciplinary Applied Research in Materials Science and Technology ; 149-154

MATERIALS SCIENCE FORUM ; 480/481

Publication date:

2005-01-01

Size:

6 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Criado, D. / Alayo, M. I. / Pereyra, I. et al. | British Library Online Contents | 2004

Fabrication of PECVD-silicon oxynitride-based optical waveguides

Alayo, M. I. / Criado, D. / Carreno, M. N. et al. | British Library Online Contents | 2004

XRR and GISAXS study of silicon oxynitride films

Bernstorff, S. / Dubcek, P. / Pivac, B. et al. | British Library Online Contents | 2006

Deuterium diffusion into plasma-deposited silicon oxynitride films

Arnoldbik, W. M. / Maree, C. H. M. / Habraken, F. H. P. M. | British Library Online Contents | 1994

Neural network modeling of PECVD silicon nitride films

Ghosh, S. / Dutta, P.K. / Bose, D.N. | British Library Online Contents | 1999