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Silicon Oxynitride ECR-PECVD Films for Integrated Optics
Silicon Oxynitride ECR-PECVD Films for Integrated Optics
Silicon Oxynitride ECR-PECVD Films for Integrated Optics
Pernas, P. L. (author) / Ruiz, E. (author) / Garrido, J. (author) / Piqueras, J. (author) / Paszti, F. (author) / Climent-Font, A. (author) / Lifante, G. (author) / Cantelar, E. (author) / Mendez-Vilas, A.
2005-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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