Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Plasma-assisted SiC oxidation for power device fabrication

    New search for: Mandracci, P.
    New search for: Ferrero, S.
    New search for: Porro, S.
    New search for: Ricciardi, C.
    New search for: Richieri, G.
    New search for: Scaltrito, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Plasma-assisted SiC oxidation for power device fabrication

    New search for: Mandracci, P.
    New search for: Ferrero, S.
    New search for: Porro, S.
    New search for: Ricciardi, C.
    New search for: Richieri, G.
    New search for: Scaltrito, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Plasma-assisted SiC oxidation for power device fabrication

    New search for: Mandracci, P.
    New search for: Ferrero, S.
    New search for: Porro, S.
    New search for: Ricciardi, C.
    New search for: Richieri, G.
    New search for: Scaltrito, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Plasma-assisted SiC oxidation for power device fabrication

    Contributors:

    Mandracci, P. (author) / Ferrero, S. (author) / Porro, S. (author) / Ricciardi, C. (author) / Richieri, G. (author) / Scaltrito, L. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 238 ; 336-340

    Publication date:

    2004-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Plasma-Assisted Approaches in Inorganic Nanostructure Fabrication

    Zheng, J. / Yang, R. / Xie, L. et al. | British Library Online Contents | 2010

    Inductively Coupled Plasma Etching of SiC for Power Switching Device Fabrication

    Cao, L. / Li, B. / Zhao, J. H. | British Library Online Contents | 1998

    Fabrication of bioactive titania coating on nitinol by plasma electrolytic oxidation

    Siu, H. T. / Man, H. C. | British Library Online Contents | 2013

    Plasma assisted oxidation of SiGe layers at 500C: interface characterization

    Tetelin, C. / Wallart, X. / Vescan, L. et al. | British Library Online Contents | 1996

    Environmentally assisted cracking behaviour of plasma electrolytic oxidation coated AZ31 magnesium alloy

    Srinivasan, P.B. / Liang, J. / Blawert, C. et al. | British Library Online Contents | 2011

    Back to top