Black germanium produced by inductively coupled plasma etching

Schicho, S. / Jaouad, A. / Sellmer, C. et al. | British Library Online Contents | 2013

Reactive ion etching of FePt using inductively coupled plasma

Kanazawa, T. / Ono, K. / Takenaka, M. et al. | British Library Online Contents | 2008

Inductively coupled plasma etching of GaN using Cl2/He gases

Lin, Y. C. / Chang, S. J. / Su, Y. K. et al. | British Library Online Contents | 2003

Etching of platinum thin films in an inductively coupled plasma

Wuu, D. S. / Kuo, N. H. / Liao, F. C. et al. | British Library Online Contents | 2001

High selectivity Inductively Coupled Plasma etching of GaAs over InGaP

Hays, D. C. / Cho, H. / Lee, J. W. et al. | British Library Online Contents | 2000