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    Chemical vapor deposition of ruthenium and ruthenium oxide thin films for advanced complementary metal-oxide semiconductor gate electrode applications

    New search for: Papadatos, F.
    New search for: Consiglio, S.
    New search for: Skordas, S.
    New search for: Eisenbraun, E. T.
    New search for: Kaloyeros, A. E.
    New search for: Peck, J.
    New search for: Thompson, D.
    New search for: Hoover, C.

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    Chemical vapor deposition of ruthenium and ruthenium oxide thin films for advanced complementary metal-oxide semiconductor gate electrode applications

    New search for: Papadatos, F.
    New search for: Consiglio, S.
    New search for: Skordas, S.
    New search for: Eisenbraun, E. T.
    New search for: Kaloyeros, A. E.
    New search for: Peck, J.
    New search for: Thompson, D.
    New search for: Hoover, C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Chemical vapor deposition of ruthenium and ruthenium oxide thin films for advanced complementary metal-oxide semiconductor gate electrode applications

    New search for: Papadatos, F.
    New search for: Consiglio, S.
    New search for: Skordas, S.
    New search for: Eisenbraun, E. T.
    New search for: Kaloyeros, A. E.
    New search for: Peck, J.
    New search for: Thompson, D.
    New search for: Hoover, C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Chemical vapor deposition of ruthenium and ruthenium oxide thin films for advanced complementary metal-oxide semiconductor gate electrode applications

    Contributors:

    Papadatos, F. (author) / Consiglio, S. (author) / Skordas, S. (author) / Eisenbraun, E. T. (author) / Kaloyeros, A. E. (author) / Peck, J. (author) / Thompson, D. (author) / Hoover, C. (author)

    Published in:

    JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 19 ; 2947-2955

    Publication date:

    2004-01-01

    Size:

    9 pages

    ISSN:

    0884-2914

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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