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    Depth profiled porosity and microstructure evolution studied by positron annihilation and Raman spectroscopy in SiOCH low-k films

    New search for: Macchi, C.
    New search for: Mariotto, G.
    New search for: Karwasz, G. P.
    New search for: Zecca, A.
    New search for: Bettonte, M.
    New search for: Brusa, R. S.

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    Depth profiled porosity and microstructure evolution studied by positron annihilation and Raman spectroscopy in SiOCH low-k films

    New search for: Macchi, C.
    New search for: Mariotto, G.
    New search for: Karwasz, G. P.
    New search for: Zecca, A.
    New search for: Bettonte, M.
    New search for: Brusa, R. S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Depth profiled porosity and microstructure evolution studied by positron annihilation and Raman spectroscopy in SiOCH low-k films

    New search for: Macchi, C.
    New search for: Mariotto, G.
    New search for: Karwasz, G. P.
    New search for: Zecca, A.
    New search for: Bettonte, M.
    New search for: Brusa, R. S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
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    Document information
    Title:

    Depth profiled porosity and microstructure evolution studied by positron annihilation and Raman spectroscopy in SiOCH low-k films

    Contributors:

    Macchi, C. (author) / Mariotto, G. (author) / Karwasz, G. P. (author) / Zecca, A. (author) / Bettonte, M. (author) / Brusa, R. S. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 7 ; 289-294

    Publication date:

    2004-01-01

    Size:

    6 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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