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    Observation of dislocations in strain-relaxed silicon-germanium thin films with flat surfaces grown on ion-implanted silicon substrates

    New search for: Yamanaka, J.
    New search for: Sawano, K.
    New search for: Nakagawa, K.
    New search for: Suzuki, K.
    New search for: Ozawa, Y.
    New search for: Koh, S.
    New search for: Hattori, T.
    New search for: Shiraki, Y.

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    Observation of dislocations in strain-relaxed silicon-germanium thin films with flat surfaces grown on ion-implanted silicon substrates

    New search for: Yamanaka, J.
    New search for: Sawano, K.
    New search for: Nakagawa, K.
    New search for: Suzuki, K.
    New search for: Ozawa, Y.
    New search for: Koh, S.
    New search for: Hattori, T.
    New search for: Shiraki, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Observation of dislocations in strain-relaxed silicon-germanium thin films with flat surfaces grown on ion-implanted silicon substrates

    New search for: Yamanaka, J.
    New search for: Sawano, K.
    New search for: Nakagawa, K.
    New search for: Suzuki, K.
    New search for: Ozawa, Y.
    New search for: Koh, S.
    New search for: Hattori, T.
    New search for: Shiraki, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
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    Document information
    Title:

    Observation of dislocations in strain-relaxed silicon-germanium thin films with flat surfaces grown on ion-implanted silicon substrates

    Contributors:

    Yamanaka, J. (author) / Sawano, K. (author) / Nakagawa, K. (author) / Suzuki, K. (author) / Ozawa, Y. (author) / Koh, S. (author) / Hattori, T. (author) / Shiraki, Y. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 7 ; 389-392

    Publication date:

    2004-01-01

    Size:

    4 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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