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Surface morphologies of excimer-laser annealed BF2+ implanted Si diodes
Surface morphologies of excimer-laser annealed BF2+ implanted Si diodes
Surface morphologies of excimer-laser annealed BF2+ implanted Si diodes
Burtsev, A. (author) / Schut, H. (author) / Nanver, L. K. (author) / Veen, A. v. (author) / Slabbekoorn, J. (author) / Scholtes, T. L. (author)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 114/115 ; 109-113
2004-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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