Excimer laser annealing of B and BF2 implanted Si: Fid-Bau Portal

Excimer laser annealing of B and BF2 implanted Si

Monakhov, E. V. / Svensson, B. G. / Linnarsson, M. K. / La Magna, A. / Italia, M. / Privitera, V. / Fortunato, G. / Cuscuna, M. / Mariucci, L.

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Excimer laser annealing of B and BF2 implanted Si

Monakhov, E. V. / Svensson, B. G. / Linnarsson, M. K. / La Magna, A. / Italia, M. / Privitera, V. / Fortunato, G. / Cuscuna, M. / Mariucci, L.

Excimer laser annealing of B and BF2 implanted Si

Monakhov, E. V. / Svensson, B. G. / Linnarsson, M. K. / La Magna, A. / Italia, M. / Privitera, V. / Fortunato, G. / Cuscuna, M. / Mariucci, L.

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Title:

Excimer laser annealing of B and BF2 implanted Si

Contributors:

Monakhov, E. V. (author) / Svensson, B. G. (author) / Linnarsson, M. K. (author) / La Magna, A. (author) / Italia, M. (author) / Privitera, V. (author) / Fortunato, G. (author) / Cuscuna, M. (author) / Mariucci, L. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 124-125 ; 232-234

Publication date:

2005-01-01

Size:

3 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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Tanaka, Y. / Tanoue, H. / Arai, K. | British Library Online Contents | 2002

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Stepanov, A. L. / Hole, D. E. / Bukharaev, A. A. et al. | British Library Online Contents | 1998