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    SiGe-on-insulator material fabrication by oxygen implantation into SiGe/Si heterostructure and novel two-step annealing

    New search for: Zhang, M.
    New search for: An, Z.
    New search for: Lin, C.
    New search for: Chu, P. K.

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    SiGe-on-insulator material fabrication by oxygen implantation into SiGe/Si heterostructure and novel two-step annealing

    New search for: Zhang, M.
    New search for: An, Z.
    New search for: Lin, C.
    New search for: Chu, P. K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    SiGe-on-insulator material fabrication by oxygen implantation into SiGe/Si heterostructure and novel two-step annealing

    New search for: Zhang, M.
    New search for: An, Z.
    New search for: Lin, C.
    New search for: Chu, P. K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    SiGe-on-insulator material fabrication by oxygen implantation into SiGe/Si heterostructure and novel two-step annealing

    Contributors:

    Zhang, M. (author) / An, Z. (author) / Lin, C. (author) / Chu, P. K. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 114/115 ; 255-259

    Publication date:

    2004-01-01

    Size:

    5 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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