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Effects of oxygen flow rate on the properties of HfO2 layers grown by metalorganic molecular beam epitaxy
Effects of oxygen flow rate on the properties of HfO2 layers grown by metalorganic molecular beam epitaxy
Effects of oxygen flow rate on the properties of HfO2 layers grown by metalorganic molecular beam epitaxy
Moon, T. H. (author) / Myoung, J. M. (author)
APPLIED SURFACE SCIENCE ; 240 ; 197-203
2005-01-01
7 pages
Article (Journal)
English
DDC:
621.35
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