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    Silicon microstructure fabricated by laser micro-patterning method combined with wet etching process

    New search for: Oishi, T.
    New search for: Goto, M.
    New search for: Pihosh, Y.
    New search for: Kasahara, A.
    New search for: Tosa, M.

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    Silicon microstructure fabricated by laser micro-patterning method combined with wet etching process

    New search for: Oishi, T.
    New search for: Goto, M.
    New search for: Pihosh, Y.
    New search for: Kasahara, A.
    New search for: Tosa, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Silicon microstructure fabricated by laser micro-patterning method combined with wet etching process

    New search for: Oishi, T.
    New search for: Goto, M.
    New search for: Pihosh, Y.
    New search for: Kasahara, A.
    New search for: Tosa, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Silicon microstructure fabricated by laser micro-patterning method combined with wet etching process

    Contributors:

    Oishi, T. (author) / Goto, M. (author) / Pihosh, Y. (author) / Kasahara, A. (author) / Tosa, M. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 241 ; 223-226

    Publication date:

    2005-01-01

    Size:

    4 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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