Controlling growth density and patterning of single crystalline silicon nanowires

Chang, T. H. / Chang, Y. C. / Liu, F. K. et al. | British Library Online Contents | 2010

Silicon microstructure fabricated by laser micro-patterning method combined with wet etching process

Oishi, T. / Goto, M. / Pihosh, Y. et al. | British Library Online Contents | 2005

Excimer-laser patterning of copper in LDE (laser dry etching)

Pfleging, W. / Voerckel, A. / Duddek, H. et al. | British Library Online Contents | 1997

Biological functionalization and patterning of porous silicon prepared by Pt-assisted chemical etching

Li, H. F. / Han, H. M. / Wu, Y. G. et al. | British Library Online Contents | 2010

Simple nanostructuring on silicon surface by means of focused beam patterning and wet etching

Koh, M. / Sawara, S. / Shinada, T. et al. | British Library Online Contents | 2000