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Evolution of Stress-Induced Surface Damage and Stress-Relaxation of Electroplated Cu Films at Elevated Temperatures
Evolution of Stress-Induced Surface Damage and Stress-Relaxation of Electroplated Cu Films at Elevated Temperatures
Evolution of Stress-Induced Surface Damage and Stress-Relaxation of Electroplated Cu Films at Elevated Temperatures
Hwang, S. J. (author) / Koike, J. (author) / Joo, Y. C. (author)
MATERIALS SCIENCE FORUM ; 475/479 ; 3641-3646
2005-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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