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Pattern Evaluation for In-plane Displacement Measurement of Thin Films

Thota, P. / Leifer, J. / Smith, S. W. / Lumpp, J. K.

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Pattern Evaluation for In-plane Displacement Measurement of Thin Films

Thota, P. / Leifer, J. / Smith, S. W. / Lumpp, J. K.

Pattern Evaluation for In-plane Displacement Measurement of Thin Films

Thota, P. / Leifer, J. / Smith, S. W. / Lumpp, J. K.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Pattern Evaluation for In-plane Displacement Measurement of Thin Films

Contributors:

Thota, P. (author) / Leifer, J. (author) / Smith, S. W. (author) / Lumpp, J. K. (author)

Published in:

EXPERIMENTAL MECHANICS ; 45 ; 18-26

Publication date:

2005-01-01

Size:

9 pages

ISSN:

0014-4851

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1

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