Defect Evolution in Ion Irradiated 6H-SiC Epitaxial Layers: Fid-Bau Portal

Defect Evolution in Ion Irradiated 6H-SiC Epitaxial Layers

Ruggiero, A. / Zimbone, M. / Roccaforte, F. / Libertino, S. / La Via, F. / Reitano, R. / Calcagno, L.

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Defect Evolution in Ion Irradiated 6H-SiC Epitaxial Layers

Ruggiero, A. / Zimbone, M. / Roccaforte, F. / Libertino, S. / La Via, F. / Reitano, R. / Calcagno, L.

Defect Evolution in Ion Irradiated 6H-SiC Epitaxial Layers

Ruggiero, A. / Zimbone, M. / Roccaforte, F. / Libertino, S. / La Via, F. / Reitano, R. / Calcagno, L.

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Title:

Defect Evolution in Ion Irradiated 6H-SiC Epitaxial Layers

Contributors:

Ruggiero, A. (author) / Zimbone, M. (author) / Roccaforte, F. (author) / Libertino, S. (author) / La Via, F. (author) / Reitano, R. (author) / Calcagno, L. (author) / Nipoti, R. / Poggi, A. / Scorzoni, A.

Published in:

Silicon Carbide and Related Materials 2004 ; 485-488

MATERIALS SCIENCE FORUM ; 483/485

Publication date:

2005-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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