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SiCN thin film prepared at room temperature by r.f. reactive sputtering

Wu, X. C. / Cai, R. Q. / Yan, P. X. / Liu, W. M. / Tian, J.

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SiCN thin film prepared at room temperature by r.f. reactive sputtering

Wu, X. C. / Cai, R. Q. / Yan, P. X. / Liu, W. M. / Tian, J.

SiCN thin film prepared at room temperature by r.f. reactive sputtering

Wu, X. C. / Cai, R. Q. / Yan, P. X. / Liu, W. M. / Tian, J.

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Order at Subito €

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Document information

Title:

SiCN thin film prepared at room temperature by r.f. reactive sputtering

Contributors:

Wu, X. C. (author) / Cai, R. Q. (author) / Yan, P. X. (author) / Liu, W. M. (author) / Tian, J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 185 ; 262-266

Publication date:

2002-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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