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Solid phase crystallisation of HfO2 thin films

Modreanu, M. / Sancho-Parramon, J. / O'Connell, D. / Justice, J. / Durand, O. / Servet, B.

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Solid phase crystallisation of HfO2 thin films

Modreanu, M. / Sancho-Parramon, J. / O'Connell, D. / Justice, J. / Durand, O. / Servet, B.

Solid phase crystallisation of HfO2 thin films

Modreanu, M. / Sancho-Parramon, J. / O'Connell, D. / Justice, J. / Durand, O. / Servet, B.

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Check availability in my library

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Document information

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Document information

Title:

Solid phase crystallisation of HfO2 thin films

Contributors:

Modreanu, M. (author) / Sancho-Parramon, J. (author) / O'Connell, D. (author) / Justice, J. (author) / Durand, O. (author) / Servet, B. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 118 ; 127-131

Publication date:

2005-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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