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Effect of substrate temperatures on texture in thin films by magnetron sputtering

Cheng, F. / Jiang, C. / Wu, J.

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Effect of substrate temperatures on texture in thin films by magnetron sputtering

Cheng, F. / Jiang, C. / Wu, J.

Effect of substrate temperatures on texture in thin films by magnetron sputtering

Cheng, F. / Jiang, C. / Wu, J.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Effect of substrate temperatures on texture in thin films by magnetron sputtering

Contributors:

Cheng, F. (author) / Jiang, C. (author) / Wu, J. (author)

Published in:

MATERIALS LETTERS ; 59 ; 1530-1532

Publication date:

2005-01-01

Size:

3 pages

ISSN:

0167-577X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105 / 530

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