Compositional, structural and optical properties of Si-rich a-SiC:H thin films deposited by ArF-LCVD: Fid-Bau Portal

Compositional, structural and optical properties of Si-rich a-SiC:H thin films deposited by ArF-LCVD

Lopez, E. / Chiussi, S. / Kosch, U. / Gonzalez, P. / Serra, J. / Serra, C. / Leon, B.

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Compositional, structural and optical properties of Si-rich a-SiC:H thin films deposited by ArF-LCVD

Lopez, E. / Chiussi, S. / Kosch, U. / Gonzalez, P. / Serra, J. / Serra, C. / Leon, B.

Compositional, structural and optical properties of Si-rich a-SiC:H thin films deposited by ArF-LCVD

Lopez, E. / Chiussi, S. / Kosch, U. / Gonzalez, P. / Serra, J. / Serra, C. / Leon, B.

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Check availability in my library

Order at Subito €

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Title:

Compositional, structural and optical properties of Si-rich a-SiC:H thin films deposited by ArF-LCVD

Contributors:

Lopez, E. (author) / Chiussi, S. (author) / Kosch, U. (author) / Gonzalez, P. (author) / Serra, J. (author) / Serra, C. (author) / Leon, B. (author)

Published in:

APPLIED SURFACE SCIENCE ; 248 ; 113-117

Publication date:

2005-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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