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Annealing Effect on the Optical Properties of a-SiC:H Films Deposited by PECVD
Annealing Effect on the Optical Properties of a-SiC:H Films Deposited by PECVD
Annealing Effect on the Optical Properties of a-SiC:H Films Deposited by PECVD
Kim, Y.-T. (author) / Cho, S.-M. (author) / Hong, B. (author) / Suh, S.-J. (author) / Jang, G.-E. (author) / Yoon, D.-H. (author)
MATERIALS TRANSACTIONS ; 43 ; 2058-2062
2002-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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